SMC Normally Closed High Vacuum Solenoid Valve XSA Dimensions Sample Parameter Selection Manual

SMC Normally Closed High Vacuum Solenoid Valve XSA Dimensions Sample Parameter Selection Manual Features: Minimum operating pressure: 1×10-6Pa(abs) Leakage amount: internal 1.3×10-9Pa?m3/s, external 1.3×10-11Pa?m3/s. There are 2 types of connectors and internal thread options. Power consumption: reduced by up to 25%. Mass: up to 18% reduction 0.5kg → 0.41kg.